Why Is It Important to Control Humidity Inside A Cleanroom?
Relative humidity: it’s among the environmental conditions typically specified for cleanroom operations. The relative humidity inside a semiconductor cleanroom typically is controlled to a target value within the 30 – 50% range, and tolerances as narrow as ± 1% for a few areas, like photolithography—or even less for DUV processing—and relaxing to ± 5% in…
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